Surfaces, Interfaces, and Films for Microelectronics by Eugene A. Irene
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Author: Eugene A. Irene
Number of Pages: 516 pages
Published Date: 11 Mar 2008
Publisher: John Wiley and Sons Ltd
Publication Country: Hoboken, United States
Language: English
ISBN: 9780470174470
Download Link: Surfaces, Interfaces, and Films for Microelectronics
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The practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes, this reference explains key concepts and important analytical techniques. It discusses films and interfaces, electronic passivation of semiconductor-dielectric film interfaces, the Si-SiO2 interface, and other MOSFET interfaces, and includes figures, charts, exercises, and examples of applications. This is the ideal guide to help professionals in the electronics industry get up to speed fast. It is also an excellent text for upper-level graduate and undergraduate students.
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